>> P.215
PrincipleAnultra-precisionscanningmotorisadoptedtoachieveultra-highaccuracy.<Benefitsofscanmotors>•Highaccuracyisachievedwithhighlystableandsmoothrotation.•Alongservicelifewithoutrequiringmaintenance.•Ultra-high-speedmeasurementat3200scanspersecondfollowsanypositionalchangeoftheworkpiece.•Beingaffectedlittlebytheambienttemperatureandhumiditychangesenableshighaccuracy.Principlediagramoflaserscanmicrometer(scanmotortype)CollimatinglensMotorWorkpieceCondenserlensPolygonalmirrorPolygonalmirrorPowersourceSemiconductorlaserPhotoelectricelement(Resetsignalgeneration)AmplifierPhotoelectricelement(receiver)MPMotordrivingpulseClockpulseRSROMRAMCounterGateSegmentselectioncircuitCPUEdgedetectionEdgedetectioncircuitcircuitRSKeyboardDatadisplayRS-232CAnalogI/OFootswitchExpansionslotAsshownintheblockdiagramabove,thelaserbeamemittedfromthesemiconductorlasersynchronizeswiththeclockpulseandisreflectedbythepolygonmirrorrotatingathighspeed.Then,itisconvertedtoaparallelbeambythecollimatorlens,scansacrosstheworkpieceandfinallyreachesthephotodetector.Thephotodetectorgeneratesavoltagewhileitdetectslaserlightduringthescan.Accordingtothepresenceorabsenceofdetectorvoltage,thedimensionisdisplayedbycountingthepulsesgeneratedwhilethelaserbeamisblockedbytheworkpiece.Therefore,theworkpiecesizeandgapsbetweenworkpiecescanbemeasured.Inthislaserscanningmethod,theessentialelementtoachievehighaccuracyistheconstantscanningspeedofthelaserbeam.Mitutoyoʼcomponents.slaserscanmicrometersaddressthisrequirementbyadoptingtheultra-precisionscanningmotorandultra-high-precisionopticalExcellentlinearityisanessentialprerequisiteforhighaccuracyovertheentiremeasuringrange,andtheLSMishighlylinear.Accuracyisguaranteedforboththeentiremeasuringrangeandnarrowrange*,andmeasurementvaluesarestabilized.*ExceptingtheLSM-500SandLSM-9506.Awidechoiceofcalibrationgaugesisavailable(optional)5-2
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